Lithography Lasers

Lithography, or more specifically photolithography, is a material processing technique which is widely used in the semiconductor industry for etching nanoscale structures into wafers. This process transfers shapes from a photomask to the wafer using ultraviolet light either by a gas discharge lamp or by ultraviolet lithography lasers. UV light is traditionally used in photolithography because the minimum image size of an optical system is dependent on the wavelength of light. Furthermore, lithography lasers are preferable for high-end applications because the monochromatic nature of laser light eliminates the residual chromatic aberrations from the broadband light source. Additionally, blue and UV lithography lasers can be used in the production of the photomask itself by splitting the beam and interfering it at the precise angle to generate the desired photomask pattern. On this page, you will find a list of all of the lithography lasers we offer including both blue and UV diode and DPSS lasers.

To see a full list of other applications RPMC lasers are used for please check out our applications page by clicking here.

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Part Number	Type	Output power (W)	Mode	Output	Linewidth	Pulse energy (uJ)	Pulse width	Rep rate
405L-2XA	LD Module	0.015, 0.030, 0.040	Single-Mode Lasers	Free Space, MM Fiber, SM Fiber, PM Fiber	Narrow
488L-2XA	LD Module	0.010, 0.015, 0.030	Single-Mode Lasers	Free Space, MM Fiber, SM Fiber, PM Fiber	Narrow
Onda 266nm	Pulsed DPSS Lasers	0.800				80.0	2ns - 6ns	Single shot to 1kHz, Single shot to 50kHz
Quantas-Q2-211	Pulsed DPSS Lasers	0.035, 0.060, 0.080, 0.120				20.0, 500.0, 1000.0, 1800.0, 2500.0, 3000.0, 5000.0	5ns, 6ns, 7ns, 8ns	10Hz, 20Hz, 33.3Hz, 50Hz
Quantas-Q2-213	Pulsed DPSS Lasers	0.060, 0.075, 0.080, 0.120, 0.150				20.0, 500.0, 1000.0, 1800.0, 2500.0, 3000.0, 5000.0	5ns, 6ns, 7ns, 8ns, 10ns	10Hz, 20Hz, 33.3Hz, 50Hz, 100Hz, 200Hz
Quantas-Q2-263	Pulsed DPSS Lasers	0.110, 0.200, 0.300, 0.330				100.0, 1500.0, 5000.0, 6000.0, 10000.0, 12000.0	5ns, 6ns, 7ns, 8ns	10Hz, 20Hz, 33.3Hz, 50Hz
Quantas-Q2-266	Pulsed DPSS Lasers	0.160, 0.200, 0.250, 0.500, 0.600				100.0, 5000.0, 6000.0, 8000.0, 12000.0	5ns, 6ns, 7ns, 8ns, 10ns	20Hz, 33.3Hz, 50Hz, 100Hz, 200Hz
Quantas-Q2-351	Pulsed DPSS Lasers	0.200, 0.500, 0.600, 1.0				300.0, 3000.0, 12000.0, 15000.0, 18000.0, 20000.0, 30000.0	5ns, 6ns, 7ns, 8ns	10Hz, 20Hz, 33.3Hz, 50Hz
Quantas-Q2-355	Pulsed DPSS Lasers	0.340, 0.500, 0.600, 1.0, 1.2				300.0, 4000.0, 12000.0, 15000.0, 18000.0, 20000.0	5ns, 6ns, 7ns, 8ns, 10ns	20Hz, 33.3Hz, 50Hz, 100Hz, 200Hz
Quantas-Q2HE-211	Pulsed DPSS Lasers	0.050, 0.075, 0.080				1500.0, 4000.0, 5000.0	6ns	10Hz, 20Hz, 50Hz
Quantas-Q2HE-213	Pulsed DPSS Lasers	0.040, 0.070, 0.075, 0.150				1500.0, 3000.0, 3500.0, 4000.0	6ns	10Hz, 20Hz, 50Hz, 100Hz
Quantas-Q2HE-263	Pulsed DPSS Lasers	0.180, 0.250, 0.300				5000.0, 15000.0, 18000.0	6ns	10Hz, 20Hz, 50Hz
Quantas-Q2HE-266	Pulsed DPSS Lasers	0.600				5000.0, 10000.0	7ns	20Hz, 50Hz, 100Hz
Quantas-Q2HE-351	Pulsed DPSS Lasers	0.350, 0.600				12000.0, 30000.0, 35000.0	6ns	10Hz, 20Hz, 50Hz
Quantas-Q2HE-355	Pulsed DPSS Lasers	0.300, 0.500, 0.600, 1.0, 1.2				12000.0, 20000.0, 25000.0, 30000.0	6ns	10Hz, 20Hz, 50Hz, 100Hz
SB1-236.5	Pulsed DPSS Lasers, Microchip Lasers	0.001				0.200, 2.0	2ns	500Hz, 5kHz
SB1-266	Pulsed DPSS Lasers, Microchip Lasers	0.002, 0.005				0.500, 1.0, 2.0	1.3ns	1kHz, 5kHz, 10kHz
SB1-355	Pulsed DPSS Lasers, Microchip Lasers	0.010			Narrow	1.0	1.3ns	5kHz, 10kHz

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